Optimisation of microlenses fabricated by deep proton irradiation and styrene diffusion

H.J-. Woo a, Y.-S. Kim a, H.-W. Choi a, W. Hong a, S Lee b, M. Kufner c, S. Kufner c

a Korea Institute of Geoscience and Mineral Resources, P.O. Box 111, Daedeok Science Town, Taejon 305-350, South Korea
b Department of Chemistry, Taejon University, Yongun-dong 91-3, Dong-gu, Taejon 300-716, South Korea
c Institute of Microtechnology Mainz, P.O. Box 100263, D-55133 Mainz, Germany


Microlenses with high relative aperture can be fabricated in PMMA by irradiation with energetic proton beams and diffusion of monomer vapour into the irradiated domains. For good reproducibility of the experiments, stable conditions regarding the temperature and pressure during diffusion have to be guaranteed and the deposited dose in the PMMA must be controlled exactly. A diffusion apparatus has been designed and constructed in order to precisely control the diffusion parameters. Microlenses were fabricated on PMMA substrates, which have been irradiated with 3 MeV proton beam through a metal mask with circular apertures. The curing of the microlenses has been done successfully with 254 nm UV, which is highly absorbed by styrene. Ranges of the diffusion temperature and the diffusion time for the proper swelling have been determined experimentally as a function of deposited fluence in a range between 5 x 1012 and 5 x 1013 ions/cm2.

Keywords : PMMA; Prpton beam; Styrene diffusion; Swelling

Microelectronic Engineering, 57-58(2001)945

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