1) University of Tokyo, 3-1, Hongo 7 chome, Bunkyo-ku, Tokyo, Japan
2) The Institute Physical and Chemical Research(RIKEN), Hirosawa 2-1, Wako, Saitama 351, Japan
3) Institute for Environmental Sciences, Rokkashomura, Aomori, Japan
The detection limits of oxygen and silicon in a SiO2 sample were compared between a time-of-flight elastic recoil detection analysis (TOF-ERDA) and conventional ERDA using a 41.5 MeV 40Ar ion beam. With TOF-ERDA, an energy spectrum of each mass can be extracted by measuring both the flight time and the energy of each recoil particle while conventional ERDA provides an overlapped energy spectrum fo all masses. It was found that the oxygen can be detected at areal densities of as low as 6.62 x 1013 atoms/cm2 by TOF-ERDA, and that the detection limits can be improved by the factor of 5 compared to conventional ERDA.
Japanese Journal of Applied Physics, 36(1997)L952.